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Virtual Lab: Minilab ? Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
The exposed wafer is then moved to the lithography developing wetbench. This wetbench has five liquid baths. The photoresist developer solution is on the far left. The baths in the middle contain de-ionized water for rinsing. On the far right is the photoresist stripper solution.

The wafer is transferred to the develop station using tweezers.

 
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