We Can Figure This Out.org
Virtual Lab: Minilab ‐ Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
A micropipette is used to dispense the first chemical, "HMDS," through the hole in the spinner top. Micropipettes use pressure differentials for drawing in and dispensing liquids (and are basically fancy hypodermic syringes).

HMDS is a watery chemical that acts as a wetting agent to help bind the photoresist (in the next step) to the surface of the oxidized silicon wafer.

 
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