We Can Figure This Out.org
Virtual Lab: Minilab ‐ Lithography
University of Virginia
             
Other pages on the "Minilab":

Lab Overview

Oxidation

Etching

Doping

Metallization

Pages on Semiconductor Science:

How Semiconductors and Transistors Work

Making an Integrated Circuit (IC)

Semiconductor Crystals

Crystal Facets and "Miller Indicies"

Pages on Microelectronics Manufacturing:

Micron Technologies Plant

Micron Technologies "Fab"

An Employee′s Eye View


Manufacturing Tools:

Optical Lithography

Projection Electron Lithography

Extreme UV Lithography