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Virtual Lab: Minilab ‐ Lithography
University of Virginia
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The wafer is now transferred to the pre-bake hotplate. The purpose of the pre-bake is to slightly dry out and harden the photoresist layer so that it will not stick to the "mask" that will soon cover it. Any vapors released during photoresist drying are vented through the opening in the top of the hood. The hotplate is made of cast aluminum and contains a cast-in electronic heating element.
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