We Can Figure This Out.org
Virtual Lab: Minilab ? Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
After alignment, the turntable is rotated to bring the exposure light source above the mask and wafer combination.

This bright light, rich in ultraviolet, causes the photoresist chemicals to weaken their bonds where the light is able to pass through the transparent areas of the mask to the wafer.

Exposure times of 7 seconds are typical and are controlled by a timer.

 
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