We Can Figure This Out.org
Virtual Lab: Projection Electron Lithography (SCALPEL)
University of Virginia
             
 
© 2003-Present, John C. Bean
 
The aperture blocks the widely scattered electrons, while allowing the less strongly scattered electrons to pass through.

In this way, only electrons (shown in blue) that pass through the light regions of the mask, reach the wafer below.

The electrons are then refocused by an electron lens system.

 
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