We Can Figure This Out.org
Virtual Lab: Projection Electron Lithography (SCALPEL)
University of Virginia
             
 
© 2003-Present, John C. Bean
 
Here we show only one area of the mask for simplicity.

The light regions of the mask deflect the electrons weakly and to small angles, while the dark patterned regions deflect the electrons strongly and to high angles.

 
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