We Can Figure This Out.org
Virtual Lab: Projection Electron Lithography (SCALPEL)
University of Virginia
             
 
© 2003-Present, John C. Bean
 
An electron lens system (shown as a quartz lens for simplicity) focuses the beam onto a thin patterned mask.

The mask is made up of a thin membrane of high atomic number on top of another membrane of low atomic number.

The circuit pattern in the top membrane will be projected onto the wafer.

 
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