We Can Figure This Out.org
Virtual Lab: Minilab ? Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
A second micropipette is now used to dispense the photoresist "S1818" through the hole in the spinner top. The photoresist bottle and enclosure are located behind the HMDS bottle on the photolithography bench.

The blue containers for the HMDS and photoresist minimize exposure to their vapors. Most chemicals used in semiconductor processing present some hazards and it is best to avoid breathing their vapors or having them contact your skin.

 
Last Scene
Next Scene