This webpage describes the photolithography process in UVA?s "Minilab" undergraduate teaching facility.
Photolithography is the second step in fabricating a device such as a semiconductor diode. It is preceded by oxidation and followed by etching.
To start this tour, click the "Next Scene" button at the bottom of this page.
To navigate further, use the buttons at the bottom of the page. (You can also move between scenes by using your keyboard’s arrows, and then play movies by clicking enter/return).
At any point, you can jump ahead by clicking an icon above the picture. For links to an overview of the lab and pages on each piece of equipment, click on the "Related Pages" button above.