We Can Figure This Out.org
Virtual Lab: EUV Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
In the C2 condenser array, each of these beams bounces off one mirror.

The mirrors rotate the arcs such that they superimpose into a single illumination arc at the mask. Here only two light paths are shown for simplicity.

The C3 Condenser elements are weak convex mirrors, which position the light accurately onto the mask.

 
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