|
© 2003-Present, John C. Bean |
|
|
|
|
|
|
In a microelectronics facility, a key process is photolithography.
Photolithography is the method by which a complex pattern is transferred to a silicon wafer.
Here we show the two modules that make up the photolithography tool.
|
|
|
|
|
|
|
|
Last Scene
|
|
Next Scene
|
|
|
|