We Can Figure This Out.org
Virtual Lab: Minilab - Doping Furnace
University of Virginia
             
 
© 2003-Present, John C. Bean
 
The boat is slowly pushed inward. This assures that the wafers heat in an even, strain-free, manner. This prevents the formation of crystalline flaws called "misfit dislocations" which could hurt transistor performance. Even heating can be accomplished by moving the boat very slowly or by using the start/stop motion depicted.

The boat is then stopped in the central "sweet-zone" of the furnace where the temperature is most uniform.

 
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