We Can Figure This Out.org
Virtual Lab: Molecular Beam Epitaxy (MBE)
University of Virginia
             
 
© 2003-Present, John C. Bean
 
The wafer is then shifted into the large MBE growth chamber by moving the rail and spatula. In the growth chamber, it is lifted from the spatula up onto the bottom of a large rotatable heater assembly.

The rail and spatula are then withdrawn back into the center chamber. A valve (not shown) then closes to separate the two chambers (allowing other wafers to be loaded or FIB patterned while the first wafer is being grown upon).

To see how MBE works, let's use virtual reality to X-ray the growth chamber:

 
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