Our MBE chamber is designed to deposit atoms of silicon and germanium. The evaporation sources are the large copper colored blocks on the bottom flange of the chamber. The front one is for silicon, the back one for germanium.
Let's take apart the front "electron gun evaporation source" (e-gun). At the rear is a large permanent magnet. In front of the magnet is a small assembly that creates an electron beam. Attached to both ends of the magnet are large iron plates ("pole pieces").
