We Can Figure This Out.org
Virtual Lab: Molecular Beam Epitaxy (MBE)
University of Virginia
             
 
© 2003-Present, John C. Bean
 
Along the front of this chamber a rail is suspended. On this rail a small arm is free to move left or right (we call the arm the "spatula" for reasons that will become obvious).

To load a wafer, the spatula is moved to the left so that it slips immediately under the fingers holding the wafer.

The cassette is then lowered just enough that the wafer reaches the spatula and is lifted off the fingers. The spatula is then moved right, holding the wafer on its front and back edges.

 
Last Scene
Next Scene