We Can Figure This Out.org
Virtual Lab: Projection Electron Lithography (SCALPEL)
University of Virginia
             
 
© 2003-Present, John C. Bean
 
SCALPEL stands for Scattering with Angular Limitation Projection Electron beam Lithography. It is a new technique for creating patterns with extremely small features in microelectronic circuits. Electrons are projected onto a "mask." Those passing straight through the mask transfer the image of the mask to the wafer. This process is analogous to the way a viewgraph projector works.

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