We Can Figure This Out.org
Virtual Lab: Minilab Overview
 University of Virginia
             
           
Heating coils
Wafer boat
Temperature controller
© 2003-Present, John C. Bean
 
The second furnace is used to bake in impurities that alter the electrical conduction of the silicon wafers.

This end of the furnace closely resembles the earlier oxidation furnace (the big differences are at the other end).

 

 

 

 

Move the mouse over labels on the left to see detailed descriptions of equipment.
 
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