We Can Figure This Out.org
Virtual Lab: Projection Electron Lithography (SCALPEL)
University of Virginia
             
Other Manufacturing Tools:

Optical Lithography

Extreme UV Lithography


Pages on Microelectronics Manufacturing:

Micron Technologies Plant

Micron Technologies "Fab"

An Employee's Eye View

Pages on Semiconductor Science:

How Semiconductors and Transistors Work

Making an Integrated Circuit (IC)

Semiconductor Crystals

Crystal Facets and "Miller Indicies"


A University Semiconductor Lab:

Oxidation

Lithography

Etching

Doping

Metallization