The Minilab is a simple non-cleanroom fabrication lab that makes working microelectronic
devices at sub-millimeter (rather than sub-micron) scales. It is located in room E-127,
Thornton Hall at the University of Virginia.
The lab is based on “Modu-lab” teaching modules from Electro-Mechanical Services Inc.
(link to: EMS Homepage). The four main EMS modules are the Oxidation Module,
the Photolithography Module, the Diffusion Module, and the Physical Vapor Deposition Module.
There are also Wet Benches for etching, photoresist development and stripping.
