We Can Figure This Out.org
Virtual Lab: Micron Technologies ? An Employee&Amp;s Eye View
University of Virginia
             
 
© 2003-Present, John C. Bean
 
Oxidation is a key step in which layers of glass (SiO2) are grown on the surface of silicon wafers. This is done by a chemical process where silicon wafers are heated in an environment of oxygen:

Si + O2 => SiO2

This takes place in temperatures between 850°C and 1200°C. Oxidation rate can be enhanced by adding water vapor.

(CLICK HERE to view a companion webpage showing ALL of the steps required to fabricate a microchip transistor).

 
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